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Automated FOUP Handling and Delivery

Automated FOUP Handling and Delivery

Built for semiconductor fabs, SESTO’s FOUP Handling and Delivery System automates the transfer of Front Opening Unified Pods (FOUPs) between process tools, EFEMs, and storage racks. Powered by the Magnus AMR platform, it combines precise navigation with coordinated motion control to move FOUPs safely and efficiently within ISO Class 5–6 cleanrooms.

Each transfer is verified through onboard sensors and managed via the MagFleet coordination system, ensuring every FOUP is accurately picked, placed, and tracked with full traceability in the fab’s MES or material control system. The result: consistent wafer flow, zero contamination risk, and uninterrupted uptime.

Challenges
  • Manual FOUP handling posed a risk of contamination and wafer misalignment within cleanroom environments.
  • Frequent FOUP transfers between EFEMs, racks, and tools required precise lift control and millimetre-level accuracy.
  • Fabs needed continuous, traceable automation to support 24/7 wafer processing without manual intervention.
Solutions
  • Cleanroom compatibility: ISO Class 5–6 compliance ensures reliable performance in sensitive fab environments.
  • Safe FOUP transfer: Controlled lifting and placement through coordinated motion control.
  • Smart confirmation: Sensor-based validation guarantees every pickup and delivery is verified.
  • Seamless integration: Connects with EFEMs, racks, MES, and scheduling systems for full traceability.
  • Fleet coordination: Managed via MagFleet for synchronized robot tasking and efficient route optimization.
Outcome
  • Improved reliability: Automated precision ensures stable wafer flow with zero contamination.
  • Operational efficiency: Continuous handling minimizes downtime and manual intervention.
  • Consistent traceability: Real-time tracking enhances audit readiness and process transparency.
  • Increased throughput: Reliable automation sustains 24/7 operation in high-volume fabs.
  • Enhanced cleanroom safety: Eliminates human handling, reducing particle risk and cross-contamination.